Structural and Optical Properties of In2O3 and Indium Tin Oxide Thin Films

M. Ali, Iftikhar; A. Al-Jenabi, Maisam

doi:10.37652/juaps.2017.141530

Document Type : Research Paper

Authors

¹ College of Science, University of Baghdad.

² College of Science , University of Anbar

https://doi.org/10.37652/juaps.2017.141530

Abstract

The present paper discusses the structural and optical properties of In2O3 and ITO thin film growing on glass and silicon substrates by assistant microwave irradiation on seeded layer nucleated by spin coating technique. X-ray diffraction study shows that the films have cubic structure. Morphology analysis was studied by atomic force microscopy (AFM) and reveals that the grain size of the prepared thin film is approximately (62.56-76.66)nm , with a surface roughness of (0.447- 1.25) nm as well as root mean square of (0.532-1.44)nm for pure In2O3 and ITO films. Optical characteristics were studied and observed that the transmission value was more than 90 % at the visible wavelength range. The direct energy gap (Eg) was found to be between (3.7-2.6) eV, which decreased significantly with increasing Sn contents..

Keywords

Main Subjects

Physics

References

[1] Solieman A. and Aegerter M., "Modeling of optical and electrical properties of In2O3:Sn coatings made by various techniques”, Thin Solid Films (2006) 502(1/2): 205−211.

[2] Ahmad M. Z., Chang J., Sadek A. Z., "Non-aqueous synthesis of In2O3nanoparticles and its NO2 gas sensing properties", IMCS– The 14th International Meeting on Chemical Sensors (2012)1060-1063.

[3] Daoudi K, Canut B, Blanchin M. G., Sandu C. S., Teodorescu V. S., Roger J. A., “Tin-doped indium oxide thin films deposited by sol-gel dip-coating technique”, Materials Science and Engineering (2002) 21: 313−317.

[4] Ishibashi K., Watabe K., Sakurai T., Okada O., Hosokawa N., “Large area deposition of ITO films by cluster type sputtering system”, J. Non-Crystalline Solids (1997) 218: 354−359.

[5] Sivaranjani V. and Philominathan P., "Influence of Substrate Temperature on Physical Properties of Nanostructured Ti Doped In2O3 Thin Films by a Simplified Perfume Atomizer Technique", Int. J. Thin. Fil. Sci. Tec. (2015) 4, No. 3, 219-225.

[6] Chen B. J., Sun X.W., Tay B. K., "Fabrication of ITO thin films by filtered cathodic vacuum arc deposition", Mater. Sci. Eng. B. (2004)106: 300-304.

[7] Cho H. J., Hwangbo C. K.,"Optical inhomogeneity and microstructure of ZrO2 thin films prepared by ion-assisted deposition”, Appl. Opt. (1996)35: 5545- 5552.

[8] Choi J., B., Kim J. H., Jeon K. A., Lee S. Y.,"Properties of ITO films on glass fabricated by pulsed laser deposition”, Mater. Sci. Eng., B. (2003) 102: 376-379.

[9] Chou T. H., Cheng K. Y., Chang T. L., Ting C. J., Hsu H. C., Wu C. J., Tsai J. H., Huang T. Y., “Fabrication of antireflection structure on TCO film for reflective liquid crystal display”, Micro electron. Eng. (2009) 86: 628-831.

[10] El Amrani A., Hijazi F., Lucas B., Bouclé J., Aldissi M., “Electronic transport and optical properties of thin oxide films”, Thin Solid Films (2010) 518: 4582- 4585.

[11] Majeed M.A., Khan W. , Ahamed M., Alhoshan M. "Structural and optical properties of In2O3 nanostructured thin film", Materials Letters (2012) 79, 119–121.

[12] Beena D., Lethy K. J., Vinodkumar R., Detty A. P., Mahadevanpillai V. P. , Ganesan V. "Photoluminescence in Laser Ablated Nanostructured Indium Oxide Thin Films" Optoelectronics and Advanced Materials – Rapid Communications Vol. 5, No. 1, 2011, 1– 11.

[13] Fakhri M. A., "Effect of Substrate Temperature on Optical and Structural Properties of Indium Oxide Thin Films Prepared by Reactive PLD Method", Eng. & Tech. Journal (2014)Vol.32 (A), No.5,1323-1330.

[14] González G.B., “Investigating the Defect Structures in Transparent Conducting Oxides Using X-ray and Neutron Scattering Techniques”, Materials (2012) 5, 818-850.

[15] Mohamed H. A., "Effect of substrate temperature on physical properties of In2O3:Sn films deposited by e-beam technique", Int. J. Physical Sciences (2012) 7(13), 2102 - 2109.

[16] Kachkanov V., Leung B., Song J., Zhang Y., Tsai C., Yuan G., Han J. and O,Donnell K., “Structural Dynamics of GaN Microcrystals in Evolutionary Selection Selective Area Growth probed by X-ray Microdiffraction”, Scientific Reports (2014) 4, Article number: 4651.

[17] Shannon R. D., "Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides". Acta Crystallogr A. (1976) 32: 751–767.

[18] Ibrahem H., Moghdad M."Preparation of ITO thin film by Sol-Gel method", Int. J. Electrical Engineering (2013) 1(6)18-22.

[19] Park J., Lee J., Kim J., Cho S., Cho Y., "Crystallization of indium tin oxide thin films prepared by RF-magnetron sputtering without external heating" ,Thin Solid Films (2005) 474, 127–132.

[20] Tauc J., Grigorovici R., Vancu A., “Optical properties and electronic structure of Germanium”, Phys. Stat. Sol., 15, p.627 (1966).

[21] Marikkannu S., Ayeshamariam A., Vidhya V. S., Sethupathy N., " Preparation of Characterizations of ITO Thin Films with Different Sn Concetration by Jet Nebulizer Technique", J. Photonics and Spintronics (2014) 3 (2) 4-9.

[22] Fallaha H. R., Ghasemia M., Hassanzadehb A., “The effect of deposition rate on electrical, optical and structural properties of tin-doped indium oxide (ITO) films on glass at low substrate temperature”, Physica B. (2006) 373: 274- 279.

Journal of University of Anbar for Pure Science

Structural and Optical Properties of In2O3 and Indium Tin Oxide Thin Films

References

References

Volume 11, Issue 1
April 2017
Page 39-46

Structural and Optical Properties of In2O3 and Indium Tin Oxide Thin Films

References

References

Volume 11, Issue 1April 2017Page 39-46

Volume 11, Issue 1
April 2017
Page 39-46